JPH051073Y2 - - Google Patents
Info
- Publication number
- JPH051073Y2 JPH051073Y2 JP17822684U JP17822684U JPH051073Y2 JP H051073 Y2 JPH051073 Y2 JP H051073Y2 JP 17822684 U JP17822684 U JP 17822684U JP 17822684 U JP17822684 U JP 17822684U JP H051073 Y2 JPH051073 Y2 JP H051073Y2
- Authority
- JP
- Japan
- Prior art keywords
- cutter
- wafer
- peeling
- cam
- support means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000010703 silicon Substances 0.000 claims 4
- 238000009434 installation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17822684U JPH051073Y2 (en]) | 1984-11-26 | 1984-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17822684U JPH051073Y2 (en]) | 1984-11-26 | 1984-11-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6194343U JPS6194343U (en]) | 1986-06-18 |
| JPH051073Y2 true JPH051073Y2 (en]) | 1993-01-12 |
Family
ID=30735793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17822684U Expired - Lifetime JPH051073Y2 (en]) | 1984-11-26 | 1984-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH051073Y2 (en]) |
-
1984
- 1984-11-26 JP JP17822684U patent/JPH051073Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6194343U (en]) | 1986-06-18 |
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